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Applied Materials Centura 5200 Four Chamber Etch - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials Centura 5200
Lot Number: 100 | Asset ID: smi83042 | Inventory ID: EU313796
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Description: Tool code AMP15 For configuration sheet Click HEREConfiguration :
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
platform type Centura
process chamber qty 4
SECS/ GEM yes
Chamber Location / Type / Current process
Position A MxP / Oxide etch, position B MxP / Oxide etch, position C MxP / Oxide etch, position D MxP / Oxide etch, position E none, position F Orienter (No laser assy)
ETCH Chamber
chamber type MxP
endpoint type Stand alone (FDD/HDD not available)
monochrometer qty each per chamber (no fiber cable)
generator model ADTEC AX-1000â…¡
Gas Panel
manual valve yes on each line, transducer yes on each line, transducer displays yes on each line, regulator yes on each line, filter yes on each line, gas panel facilities Hook Up single line drop bottom feed (Left side)
Exhaust Top
Gas panel door interlock Yes, Gas panel exhaust interlock Yes
Gas Panel Pallet
corrosive gas line qty 2 lines per chamber, inert gas line qty 6 lines per chamber, MFC type SEC-7440MC
Gas line (gas name, MFC size)
ChA : line 1 CH2F2/ 30/ SEC-7440, line 2 N2/ 70/ SEC-7440, line 3 Ar/ 100/ SEC-7440, line 4 CHF3/ 70/ SEC-7440, line 5 CF4/ 100/ SEC-7440, line 6 O2/ 50/ SEC-7440, line 7 empty, line 8 empty
ChB : line 1 CH2F2/ 30/ SEC-7440, line 2 N2/ 70/ SEC-7440, line 3 Ar/ 100/ SEC-7440, line 4 CHF3/ 70/ SEC-7440, line 5 CF4/ 100/ SEC-7440, line 6 O2/ 50/ SEC-7440, line 7 empty, line, line 8 empty
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 9011
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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