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Nikon NSR-4425i Wide Field (44Mm×44Mm) I-Line Stepper - SOLD LOT

Private Treaty Sale
Manufacturer and model: Nikon NSR-4425i
Lot Number: 11 | Asset ID: smi82803 | Inventory ID: EU313605
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Description: Tool code PAT27 For configuration sheet Click HEREConfiguration :
WAFER SPECIFICATION :
Wafer Size : 200MM
Wafer Shape : SNNF (Semi Notch No Flat)
Wafer Cassette : 8” PP Miraial
SMIF Interface : No
SYSTEM CONFIGURATION :
Projection Lens / Illumination System :
Magnification : 1/2.5
Field Size : 44x44mm ~ 54x30.9mm (within φ62.22mm)
Light Source : i-line (365nm), Mercury Lamp 2.5kW
Reticle Blind Setting Area : Max : Field size, Min : 2.5mm x 2.5mm
Reticle Stage :
Reticle Holder size : 6inch
Wafer Alignment :
Alignment sensor : LSA / FIA
Wafer Stage :
Wafer Holder size : 200mm
Max speed : Over 180mm/sec
Wafer Loader :
Loader Type : 8" loader
Pre-alignment Type : Pre-alingment2
Carrier Table# : 2
Inline Type : Right Inline
Reticle Loader :
Library# : 22
Reticle Case Type : Clear case (Nikon type-2)
Particle checker : Pellicle Particle Detector(PPD)
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 1107094
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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