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Lam Research TCP9600SE Microwave Asher - SOLD LOT

Private Treaty Sale
Manufacturer and model: Lam Research TCP9600SE
Lot Number: 115 | Asset ID: smi82664 | Inventory ID: EU313791
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Description: Tool code MTLB1 For configuration sheet Click HEREConfiguration
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
Process chamber qty etch x1, strip x1
Etch chamber TCP9600SE / Metal etch
Strip chamber Microwave stripper
ETCH Chamber
Wafer chuck ESC (bi-polar)
turbo pump EDWARDS STP-H1000C (STP-H1000WA)
Endpoint detector Dual photodiode (A-ch 261.8nm / B-ch 261.8nm)
Turbo Gate Valve VAT (6504-PH52-ADR1)
Chamber Manometer MKS E29B-23813
Top RF generator model AE 3155059-028 (LAM P/N:660-024637-008)
Bottom RF generator model AE 3155059-028 (LAM P/N:660-024637-008)
TCP Match 853-032294-002
Bias Match 853-025083-003
STRIP Chamber
Microwave power supply ASTEX AX7620 (2.45GHz 1500w)
Autotuner Smart Match system
applicator tube Quartz
Gas Box
gas box qty 1
manual valve yes on each line
pressure gauge yes on each line
regulator yes on each line
filter yes on final line
WVDS yes
Heat Exchanger Type
for Cathode TAITEC CH-800B (+10~ 80degC) qty 1
Pumps Type
Entrance load lock EBARA A30W
Etch Chamber EBARA A30W
Strip Chamber EBARA A70W
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 4563
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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