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SEN NV-GSDⅢ-90LE High Current Implanter

Private Treaty Sale
Manufacturer and model: SEN NV-GSDⅢ-90LE
Lot Number: 12 | Asset ID: smi82797 | Inventory ID: EU313584
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Tel: +44 (0)7764 308 689
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Description: Tool code HIC05 For configuration sheet Click HEREBatch Type High current , 13wfs/batch
Configuration :
Wafer Size : 200MM
Wafer Shape : SNNF (Semi Notch No Flat)
Wafer Cassette : 8" Plastic Miraial
SMIF Interface : NO
Power Distribution : 200V 60Hz 45KVA 3phase
Beam Energy : 1-90keV
Gasses : BF3 HP;PH3 SDS;AsH3 SDS
Cryo pump : Daikin V208SC612FH
Cryo pump : Daikin V24MC608GSR
Cryo Compressor : Daikin U110CW
Roughing Pump : Ebara A07V
Roughing Pump : Ebara A30W
TMP : MITSUBISHI PT-1500-A101
TMP : SEIKO SEIKI STP-H2002C
Seal pump : ALCATEL MDP5011
Seal pump : ULVAC DA-20D
Ion Source : ELS type
Mo-ARC CHAMBER
Vaporizer : Nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: S908B1200
Date of manufacture: 1999
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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