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Applied Materials P5000 Wafer Etcher 2 Chamber - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials P5000
Lot Number: 126 | Asset ID: smi82942 | Inventory ID: EU313669
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Description: Tool code AMP10 For configuration sheet Click HEREConfiguration
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
platform type P5000
process chamber qty 2
SECS/ GEM yes
Chamber Location / Type / Current process
position A MxP / Oxide etch
position B MxP / Oxide etch
ETCH Chamber
chamber type MxP
Wafer clamp Polyimide ESC
BS He cooling yes
He dump line yes
turbo pump SEIKO STP-301CVB
endpoint type stand alone
monochrometer qty each per chamber
generator model ENI OEM-12B3
max power 1250w
lid temp. control PID control
Gate valve Heated Gate valve
Matcher SMA-1000
Process Manometer MKS 1Torr
Gas Scrubber type Ebara GTE-3-0XVT (missing)
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made

















Quantity: Contact for Availability
Serial number: E-1106(6292)
Date of manufacture: 1992
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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