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Applied Materials P5000 Wafer Etcher 2 Chamber - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials P5000
Lot Number: 126 | Asset ID: smi82942 | Inventory ID: EU313669
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Description: Tool code AMP10 For configuration sheet Click HEREConfiguration
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
platform type P5000
process chamber qty 2
Chamber Location / Type / Current process
position A MxP / Oxide etch
position B MxP / Oxide etch
ETCH Chamber
chamber type MxP
Wafer clamp Polyimide ESC
BS He cooling yes
He dump line yes
turbo pump SEIKO STP-301CVB
endpoint type stand alone
monochrometer qty each per chamber
generator model ENI OEM-12B3
max power 1250w
lid temp. control PID control
Gate valve Heated Gate valve
Matcher SMA-1000
Process Manometer MKS 1Torr
Gas Scrubber type Ebara GTE-3-0XVT (missing)
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made

Quantity: Contact for Availability
Serial number: E-1106(6292)
Date of manufacture: 1992
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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