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Tokyo Electron Alpha-8SE-E (LL) Vertical Diffusion Furnace - SOLD LOT

Private Treaty Sale
Manufacturer and model: Tokyo Electron Alpha-8SE-E (LL)
Lot Number: 151 | Asset ID: smi82774 | Inventory ID: EU313665
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Description: Tool code LPCN6 For configuration sheet Click HEREALD AlOx/HfOx
Configuration
Process AlOx/HfOx ALD
Reserved batch operation Possible
Number of wafer / Batch 150
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
GAS BOX 1 N2
GAS BOX 2 Ar
GAS BOX 3 TMA
GAS BOX 4 TDMAH
GAS BOX 5 O3 with Generator
Heater Low temp heater
Heater Zone 5 zone
Control Thermocouple paddle
Max Temperature 600 C
Place of control Thermocouple between outer tube and inner tube
Pump Ebara AA200SN not included in scope
Scrubber Edwards TPU
Pressure control CKD combination valve
Type for pressure control VEC-S8-X0113
VG for control MKS Type, Range 631A11TBEH 10Torr
VG for Interlock MKS Type Range 631A13TBEH 1000Torr
O3 generator MKS Type AX8550
O2 control for Loading area with method N2 LL
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: M000000Z5608
Date of manufacture: 2002
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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