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Tokyo Electron Alpha-8S (LR) Vertical Diffusion Furnace - SOLD LOT

Private Treaty Sale
Manufacturer and model: Tokyo Electron Alpha-8S (LR)
Lot Number: 155 | Asset ID: smi82905 | Inventory ID: EU048818
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Description: Tool code LPCK1 For configuration sheet Click HEREConfiguration
Process Nitride
Reserved batch operation Possible
Number of wafer / Batch 100
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
GAS BOX 1 N2
GAS BOX 2 SiH2Cl2
GAS BOX 3 NH3
HEATER FTP
HEATER ZONE 4 zone
Control Thermocouple Paddle
Max Temperature 1000 C
Place of control Thermocouple inside inner tube
Rapid Cooling Unit with
Pump Ebara A150W-T not included in scope, needed to confirm
Pressure control N2 ballast
Type for pressure control STEC SEC-7350BMC, 20L
VG for control MKS
Type, Range 621C11TBFHB 10Torr
VG for Interlock MKS
Type Range 621C13TBFHB 1000Torr
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 3.0000965527e+011
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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