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Tokyo Electron Alpha-8SE-Z (LL) Vertical Diffusion Furnace - SOLD LOT

Private Treaty Sale
Manufacturer and model: Tokyo Electron Alpha-8SE-Z (LL)
Lot Number: 158 | Asset ID: smi82850 | Inventory ID: EU048839
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Description: Tool code LPCH7 For configuration sheet Click HEREConfiguration:
Process Nitride
Software WAVES ver.3.11
Reserved batch operation Possible
Number of wafer / Batch 150
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
GAS
GAS BOX 1 N2
GAS BOX 2 SiH2Cl2
GAS BOX 3 NH3
Heater
Heater Zone 5 zone
Control Thermocouple Paddle
Max Temperature 1000 C
Place of control Thermocouple between outer tube and inner tube
Pump Ebara A150W-T not included in scope, needed to confirm
Scrubber Ebara GTC-2-0 (QTY:1)
Pressure control N2 ballast
Type for pressure control PCU-1000-3C, STEC SEC-7350BMC 20L
VG for control MKS
Type, Range 621C11TBFHB 10Torr
VG for Interlock MKS
Type Range 621C13TBFHB 1000Torr
O2 control for Loading area with
Method N2 LL
Boat rotation with

Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: M00000255032
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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