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SEN LEX Low Enery Implanter

Private Treaty Sale
Manufacturer and model: SEN LEX
Lot Number: 18 | Asset ID: smi82811 | Inventory ID: EU313582
This item may still be for sale
You can enquire about its availability by contacting us on:
Tel: +44 (0)7764 308 689
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Description: Tool code HIC07 For configuration sheet Click HEREBatch Type High current , Low Energy, 13wfs/batch
Configuration :
Wafer Size : 200MM
Wafer Shape : SNNF (Semi Notch No Flat)
Wafer Cassette : 8" Plastic Miraial
SMIF Interface : NO
Power Distribution : 200V 60Hz 70KVA 3phase
Beam Energy : 0.2-70keV
Gasses : BF3 HP;PH3 SDS;AsH3 SDS
Cryo pump : Daikin V208SC612FSR
Cryo pump : Daikin V24MC608GSR
Cryo Compressor : Daikin U110DWCH
Roughing Pump : Ebara A10S
Roughing Pump : Ebara A30W
Seal pump : ALCATEL MDP5011
Seal pump : ULVAC DA-20D
Ion Source : ELS type
Vaporizer : Nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 354
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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