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NVGSDIII90 High Current Implanter

Private Treaty Sale
Manufacturer and model: NVGSDIII90
Lot Number: 19 | Asset ID: smi82854 | Inventory ID: EU313585
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You can enquire about its availability by contacting us on:
Tel: +44 (0)7764 308 689
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Description: Tool code HIC04 For configuration sheet Click HEREConfiguration:
Batch Type High current , 13wfs/batch
Configuration :
Tool ID HIC04
Tool Serial Number S95D5200(197)
Model NV-GSDⅢ-90
Vintage 1995
Process High current ion implanter
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
Power Distribution 200V 60Hz 45KVA 3phase
Beam Energy 2-90keV
Gasbox 2,3,4 blank
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Roughing Pump Ebara A07V
Roughing Pump2 Ebara A30W
Vaporizer nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 197
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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