NVGSDIII90 High Current Implanter
Private Treaty Sale
Manufacturer and model: NVGSDIII90
Part of sale: 200mm Wafer Fabrication Tools
Lot Number: 19 | Asset ID: smi82854 | Inventory ID: EU313585
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Tel: +44 (0)7764 308 689
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Description: Tool code HIC04 For configuration sheet Click HEREConfiguration:
Batch Type High current , 13wfs/batch
Configuration :
Description NVGSDIII90 -- HIGH CURRENT IMPLANT
Tool ID HIC04
Tool Serial Number S95D5200(197)
OEM SEN
Model NV-GSDⅢ-90
Vintage 1995
Process High current ion implanter
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
Power Distribution 200V 60Hz 45KVA 3phase
Beam Energy 2-90keV
Gasbox 2,3,4 blank
Cryo pump Daikin V208SC612FSR
Cryo pump Daikin V24MC608GM
Cryo Compressor Daikin U110CW
Roughing Pump Ebara A07V
Roughing Pump2 Ebara A30W
TMP MITSUBISHI PT-1500-A101
TMP2 MITSUBISHI PT-1500-A101
Vaporizer nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Batch Type High current , 13wfs/batch
Configuration :
Description NVGSDIII90 -- HIGH CURRENT IMPLANT
Tool ID HIC04
Tool Serial Number S95D5200(197)
OEM SEN
Model NV-GSDⅢ-90
Vintage 1995
Process High current ion implanter
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
Power Distribution 200V 60Hz 45KVA 3phase
Beam Energy 2-90keV
Gasbox 2,3,4 blank
Cryo pump Daikin V208SC612FSR
Cryo pump Daikin V24MC608GM
Cryo Compressor Daikin U110CW
Roughing Pump Ebara A07V
Roughing Pump2 Ebara A30W
TMP MITSUBISHI PT-1500-A101
TMP2 MITSUBISHI PT-1500-A101
Vaporizer nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 197
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
