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Applied Materials ENDURA 5500 PVD - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials ENDURA 5500
Lot Number: 21 | Asset ID: smi82697 | Inventory ID: EU313688
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Description: Tool code SPT07 For configuration sheet Click HEREConfiguration
Process CH-1・・・W、CH-2・・・WN、CH-3・・・MMTI
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF
Wafer Cassette 8” PEEK Miraial
WAFER TRANSFER
Load Lock A/B Type Narrow automated tilt out
Transfer Robot Type HP
Transfer Robot Blade Metal
Buffer Robot Type HP
Buffer Robot Blade Metal
Buffer Cryo Type On-Board 8F(Normal)
Transfer Cryo Type On-Board 8F(Normal)
SYSTEM CONFIGURATION
Chamber A COOL(STANDARD COOLDOWN CHAMBER)
Chamber B COOL(STANDARD COOLDOWN CHAMBER)
Chamber E Orienter(ORIENTER WITH STANDARD DEGAS)
Chamber F Orienter(ORIENTER WITH STANDARD DEGAS)
Chamber 1 Wide Body
Chamber 2 Wide Body
Chamber 3 Wide Body
CHAMBER 1
Heater Type A101
Magnet DURA
Power Supply (kw) MDX-L12-650
Cryo Type On-Board 8F(Enhanced)
CHAMBER 2
Heater Type A101
Magnet DURA
Power Supply (kw) MDX-L12-650
Cryo Type On-Board 8F(Normal)
CHAMBER 3
Heater Type B101
Magnet DURA
Power Supply (kw) MDX-L12
Wafer Bias CX-600
RF Coil Power AE HFV8000
Cryo Type On-Board 8F(Enhanced)
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 3291
Date of manufacture: 1993
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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