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Koyo Thermo System VF-5100B Vertical Diffusion Furnace - SOLD LOT

Private Treaty Sale
Manufacturer and model: Koyo Thermo System VF-5100B
Lot Number: 213 | Asset ID: smi82715 | Inventory ID: EU313890
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Description: Tool code LPCE4 For configuration sheet Click HEREConfiguration
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
GAS BOX 1 N2
GAS BOX 2 O2
Heater Zone 3 Zone
Control Thermocouple Paddle
Max Temperature 800 C
Place of control within inner tube
PUMP none
pressure control Buttafly valve
Type for pressure control STEC EC-5104
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: Q1510-1890
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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