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AG Association Heatpulse 8800 Vertical Diffusion Furnace - SOLD LOT

Private Treaty Sale
Manufacturer and model: AG Association Heatpulse 8800
Lot Number: 215 | Asset ID: smi82936 | Inventory ID: EU313874
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Description: Tool code RTAA1 For configuration sheet Click HEREConfiguration
Reserved batch operation possible
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8" Plastic Miraial
SMIF Interface NO
Wafer aligner with
End effector Hot end effector
GAS BOX 1 N2
GAS BOX 2 O2
GAS BOX 3 NH3
Chamber Material Aluminum
Lamp Zone 10 zone
Control Thermocouple Short wave pyrometer and ez-DTC
Max Temperature 1200C within 15min
Place of control Thermocouple Backside of wafer
Oven Chiller Neslab SystemⅡ
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Date of manufacture: 1998
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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