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Mattson Technology Aspen 2 ICP Asher - SOLD LOT

Private Treaty Sale
Manufacturer and model: Mattson Technology Aspen 2 ICP
Lot Number: 217 | Asset ID: smi82661 | Inventory ID: EUAHASHC1
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Description: Tool code ASHC1 For configuration sheet Click HEREConfiguration:
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
Process Chamber
Chamber location Single Chamber(Rear )
Guide Ring Alum Guide Ring(No GRIDS)
Heater Block Standard(162-00001-00)
Manometer 10Torr
Vacuum Selection KF50
RF GENERATOR
Manufacturer RF Plasma Products
Type RF10S
Power MAX/1KW (Use/975W)
Gas Box
Gas Box Type Gas Box 2Lines
Air Operation Valve Fujikin Diaphragm Model No.FPr-UDDF-71-6.35-2-JSK-UP
Regurator Yutaka
M.F.C STEC SEC-7000Series
GAS 1 O2-10slm
GAS 2 CF4-500sccm
GAS 3 N/A
GAS 4 N/A
Electrical
Software QNX Ver.3.21
SECS SECS II
UPS N/A
Exhaust
Core frame Bottom
GAS BOX Bottom
Dry Pump
Load lock Ebara A10S
Reactor Ebara A150W-M

Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 205
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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