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DNS WS820L Wet Bench / Low Pressure Dryer - SOLD LOT

Private Treaty Sale
Manufacturer and model: DNS WS820L
Lot Number: 218 | Asset ID: smi82754 | Inventory ID: EU313587
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Description: Tool code HODF7 For configuration sheet Click HEREHF/DIW/SC1/DIW/DIW/Low Pressure Dryer
Configuration :
CASSETTE : No Cassette less 50wf
Wafer Shape : SNNF (Semi Notch No Flat)
SMIF Interface : NO
Wafer size : 200mm
CLEAN UNIT : ULPA
robot : 4
Cassette stocker : Cassette transfer from loader to un loader
Process bath :
Loader : Wafer transfer, 5stock PP cassette, Chuck clean : DIW spray and N2 Dry, HF : PTFE / 25C with HF monitor, EDR : Quartz / Cold DIW with shower, SC1 : Quartz / Megasonic / 25C with SC1 monitor, QDR : Quartz / Cold DIW with shower, Final rinse : Quartz / Cold DIW with megasonic &resistivity, Dryer : PVC / Low Pressure Dryer ×2 with IPA monitor, Un-loader : Wafer transfer, 5stock PP cassette
Megasonic :
Manufacturer : Kaijo co., Type : 68101 (SC1), Power : 950kHz 600w x4 (SC1)
Chemical :
Chemical1 : NH4OH, Chemical2 : H2O2, Chemical3 : HF, Chemical4 : IPA, DIW : Hot and Cold
Electrical : Power : 100v 125A / 208v 125A / 100v 5A, SECS : SECS II, UPS : 100v 6kVA
Exhaust : ACID : 1, ALKALI : 1
Option :
Sensor : Horiba HF sensor CM-201, Sensor : Kurabo sensor KCM-21-UV, water sensor x2 : Kurabo water Sensor(RD300-IP), Ionizer : Loader, Notch aligner : Loader
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Dimensions: 6200mm(L) x 2500mm(D) x 2850mm(H)
Serial number: 61520-2590
Date of manufacture: 2002
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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