Close xWelcome to GoIndustry DoveBid. Click here to register and continue >>

DNS WS820L Wet Bench / Low Pressure Dryer - SOLD LOT

Private Treaty Sale
Manufacturer and model: DNS WS820L
Lot Number: 218 | Asset ID: smi82754 | Inventory ID: EU313587
This item has been sold.
However, we may have more of these for sale.
Use advance search or browse our upcoming auction calendar to find alternatives. Or subscribe to alerts so we can keep you informed about similar items in the future.
Description: Tool code HODF7 For configuration sheet Click HEREHF/DIW/SC1/DIW/DIW/Low Pressure Dryer
Configuration :
CASSETTE : No Cassette less 50wf
Wafer Shape : SNNF (Semi Notch No Flat)
SMIF Interface : NO
Wafer size : 200mm
robot : 4
Cassette stocker : Cassette transfer from loader to un loader
Process bath :
Loader : Wafer transfer, 5stock PP cassette, Chuck clean : DIW spray and N2 Dry, HF : PTFE / 25C with HF monitor, EDR : Quartz / Cold DIW with shower, SC1 : Quartz / Megasonic / 25C with SC1 monitor, QDR : Quartz / Cold DIW with shower, Final rinse : Quartz / Cold DIW with megasonic &resistivity, Dryer : PVC / Low Pressure Dryer ×2 with IPA monitor, Un-loader : Wafer transfer, 5stock PP cassette
Megasonic :
Manufacturer : Kaijo co., Type : 68101 (SC1), Power : 950kHz 600w x4 (SC1)
Chemical :
Chemical1 : NH4OH, Chemical2 : H2O2, Chemical3 : HF, Chemical4 : IPA, DIW : Hot and Cold
Electrical : Power : 100v 125A / 208v 125A / 100v 5A, SECS : SECS II, UPS : 100v 6kVA
Exhaust : ACID : 1, ALKALI : 1
Option :
Sensor : Horiba HF sensor CM-201, Sensor : Kurabo sensor KCM-21-UV, water sensor x2 : Kurabo water Sensor(RD300-IP), Ionizer : Loader, Notch aligner : Loader
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Dimensions: 6200mm(L) x 2500mm(D) x 2850mm(H)
Serial number: 61520-2590
Date of manufacture: 2002
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
Change to English Change to English Changer en français Wechseln Sie zu Deutsch Cambia in italiano Cambiar a Español เปลี่ยนเป็นภาษาไทย 切換到中文 日本語に変更 한국어 변경
FooterLiquidity ServicesLiquidation.comLGov DealsLNetwork InternationalLGovernment LiquidationLTruck