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Applied Materials Centura C5200W 4 Chamber CVD - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials Centura C5200W
Lot Number: 22 | Asset ID: smi82901 | Inventory ID: EU313811
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Description: Tool code CVDB4 For configuration sheet Click HEREConfiguration
Process TixZ/CVD Ti
Software Version B4223
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PEEK Miraial
SYSTEM CONFIGURATION
Wafer Transfer HP+ (Wafer Centering:ON THE FRY)
Chamber-A,B,C,D TixZ/CVD Ti
Manometer MKS 10 / 100Torr
Clean Type Cl2 Clean
RGA Port Yes(NW25 END CAP)
Chamber-E MS-Cool
Chamber-F NA
GAS DELIVERY
Single Line Drop (SLD) No
System Cabinet Exhaust Side with Top/Bottom Connection Duct
SYSTEM CONTROLLER Yes
GENERATOR RACK ADVANCED ENERGY:PDX-900-2V(QTY:4)
HEAT EXCHANGER STEELHEAD-0 (QTY:2)
LIQUID CABINET JAPAN AIR GASES:AFC-TiCl4-CAD-3-M
GAS ABATEMENT EDWARDS TPU
DRY PUMP
LOAD LOCK EBARA:A30W
BUFFER EBARA:A70W
CHAMBER EBARA:AAS100W(QTY:4)
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: X046
Date of manufacture: 1998
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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