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Mattson AWP200 Wet Bench - SOLD LOT

Private Treaty Sale
Manufacturer and model: Mattson AWP200
Lot Number: 231 | Asset ID: smi82963 | Inventory ID: EU313743
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Description: Tool code HODD5 For configuration sheet Click HERE
Configuration
CASSETTE PFA 8" 50wf : LMC-8-50-ns-o-PFA
Wafer Shape SNNF (Semi Notch No Flat)
Size 4940x1810x2500
SMIF Interface NO
Wafer size 200mm
Minienviroment ULPA
robot 1
Process bath Loader/unloader Wafer transfer, 4 stock PFA cassette
BHF PVDF / 20-30C / BHF with HORIBA monitor
Dryer PVDF / Marangoni Dryer with IPA sensor
Chuck clean PVDF / DIW with shower
HF PVDF / 20-30C / HF with HORIBA monitor
BHF PVDF / 20-30C / BHF with HORIBA monitor
Dryer PVDF / Marangoni Dryer with IPA sensor
Chemical1 BHF
Chemical2 HF
Chemical3 IPA
DIW HOT and Cold
Option Sensor x3 HORIBA HF sensor CM-201
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Dimensions: 4940x1810x2500
Serial number: 69610-011
Date of manufacture: 2002
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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