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DNS WS820C Wet Bench / Vapour Dryer - SOLD LOT

Private Treaty Sale
Manufacturer and model: DNS WS820C
Lot Number: 241 | Asset ID: smi82957 | Inventory ID: EU313590
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Description: Tool code HODF4 For configuration sheet Click HEREHF/DIW/SC1/DIW/DIW/Vaper Dryer
Configuration :
CASSETTE : PFA 8" 50wf (KM-820)
Wafer Shape : SNNF (Semi Notch No Flat)
SMIF Interface : NO
Wafer size : 200mm
CLEAN UNIT : ULPA
robot : 5
Process bath : Loader : Wafer transfer, 4stock PFA cassette, Chuck clean : DIW spray and N2 Dry, HF : PTFE / 25C, EDR : Quartz / Cold DIW with shower, SC1 : Quartz / Megasonic / 25C, QDR : Quartz / Cold DIW with shower, Final rinse : Quartz / Cold DIW with resistivity, Dryer : Quartz / Vapor Dryer, Un-loader : Wafer transfer, 4stock PFA cassette
Megasonic : Manufacturer : Kaijo co., Type : 6848 (SC1), Power : 950kHz 400w x4 (SC1)
Chemical : Chemical1 : NH4OH, Chemical2 : H2O2, Chemical3 : HF, Chemical4 : IPA, DIW : Hot and Cold
Electrical : Power : 100v 150A / 200v 115A, SECS : SECS II, UPS : 100v 6kVA
Exhaust : ACID : 1, ALKALI : 1, SOLVENT : 1
Option : Sensor : Horiba HF sensor CM-201, Sensor : Kurabo sensor KCM-21-UV, Notch aligner : Loader, Ionizer : Loader, WF rotation : Back to Back wafer transfer (even slot rotation) load/unload
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Dimensions: 7670mm(W) x 2380mm(D) x 2800mm(H)
Serial number: 55520-2108
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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