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Lam Research 2300 Versys Silicon Wafer Etch System - SOLD LOT

Private Treaty Sale
Manufacturer and model: Lam Research 2300 Versys Silicon
Lot Number: 3 | Asset ID: smi82658 | Inventory ID: EU313686
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Description: Tool code PLYE4 For configuration sheet Click HEREConfiguration
serial numbers: 72230 (PM1: 23PL0349, PM2: 23PL0350, PM3: 23PL0351, PM4: 23PL352 )
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
software version Version 1.7.1-SP4-HF2-Releace
2300 Versys Silicon Options
Chamber Type 2300 Versys Silicon
Wafer Clamping Mechanism Monopolar ESC, Ceramic
O-rings Chemraz
TCP Source 3155059-026
200MM Turbo Pump EDWARDS STP-A2203LVS
Heated Foreline Heated
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Barrier Seal Door
2300 Gas Box
Std Stacking Kits 4 PM Stacking Kit
2300 Versys Silicon Gas Box
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM EDWARDS IPX 100A
VTM Robot BROOKS Magna Tran_7.1 / 108000-07
ATM Robot BROOKS Actran_7 / 151864
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 72230
Date of manufacture: 2003
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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