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Sokudo SK2000-BVPE Coater / Developer - SOLD LOT

Private Treaty Sale
Manufacturer and model: Sokudo SK2000-BVPE
Lot Number: 35 | Asset ID: smi82857 | Inventory ID: EU313845
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Description: Tool code CD54 For configuration sheet Click HEREConfiguration
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block# 2
Coater head# 2
Barc Coater head# 2
Develop head# 4
Adhesion Chamber# 2
Cooling Plate# 10
Rapid Hot Plate(RHP)# 8
Hot Plate(RHP)# 3
EEW# 1
EEFT# 1
IFB# 1
Sourcs Bottle Cabinet(RESIST) 1
Chemical Box (HMDS/Solvent/NMDW) 1
Controller Cabinet 1
Power BOX 1
Handling Unit Controller 1
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver)
Coater
Nozzle# #6
Resist temperature System 1 temp control for 3 line x 2
Coater Cup PP+PP+PPS
Spin chuck PEEK
Resist Pump PDS-105C-KPM4-S01
Back rinse flow flow meter with sensor
VPS Pluse Mist Nozzle flow flow meter with sensor
Edge Cleaner flow meter with sensor
Solvent solution supply Central supply
Drain Central
Barc
Nozzle# #2
Resist temperature System 1 temp control for 1 line x 2
Coater Cup PP+PP+PPS
Spin chuck PEEK
Resist Pump PDS-105C-KPM4-S01
Back rinse flow flow meter with sensor
VPS Pluse Mist Nozzle flow flow meter with sensor
Edge Cleaner flow meter with sensor
Solvent solution supply Central supply
Drain Central
Developer
Nozzle Slit Scan Nozzle
Develop solution supply Central supply
Developer Cup PVC
Spin chuck PEEK
Develop Nozzle Flow flow meter with sensor
Develop Nozzle Wash flow meter with sensor
Rinse Nozzle Flow flow meter with sensor
Back Rinse Flow flow meter with sensor
Develop temperature System 1 temp control for 1 line x 2
Drain Central
Adhesion
Method Vapor prime by N2 Bubbling
Hot plate 60-150deg by 0.1deg pitch
HMDS solution supply Central supply
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 63703-1184
Date of manufacture: 2004
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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