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KLA-TENCOR AIT-FUSION Patterned Wafer Dark-Field Defect Inspection - SOLD LOT

Private Treaty Sale
Manufacturer and model: KLA-TENCOR AIT-FUSION
Lot Number: 353 | Asset ID: smi82935 | Inventory ID: EU313733
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Description: Tool code AIT05 For configuration sheet Click HEREConfiguration
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Cassette Port 2 Port
Wafer Cassette 8” PP (Miraial: KM-803P-K)
SMIF Interface NO
SYSTEM CONFIGURATION
Laser: Argon ion laser for 75mW(487.9nm) YES
Spot Sizes 7um, 5um, 3.5um
Microscope review Objectives 50x, 100x, 150x
Computer YES
Image Computer YES
Keyboard & Floppy Disk Drive YES
Power distribution YES
Wafer Handler
200mm Dual Open Cassette Loader YES
Robot YES
Prealigner YES
Blower Unit
Blower YES
Option
PSL 0.494um Wafer YES
Caltile Wafer YES
System Upgraded from AIT2 to AIT-Fusion XP YES
Note the above information is for guidance only. Changes to configuration might have been made Please note: The OEM of this tool makes a charge of 70,000 JPY to supply the parameter sheet required for exportation
Quantity: Contact for Availability
Serial number: 9009
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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