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KLA-Tencor Corporation SFS6220 Bare Wafer Dark-Field Defect Inspection - SOLD LOT

Private Treaty Sale
Manufacturer and model: KLA-Tencor Corporation SFS6220
Lot Number: 366 | Asset ID: smi82682 | Inventory ID: EU155728
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Description: Tool code SF203 For configuration sheet Click HEREConfiguration>br>Process Bare-Si INSP
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Cassette Port 2Port
Wafer Cassette 8” PEEK Miraial
SYSTEM CONFIGURATION
Surfscan 6420 Machine
Blower Unit
Surfscan6420 Machine
Laser: TESTED,LASER,ARGON,30MW YES
Laser P/S: PWR SUPPLY, LASER, ARGON, 30MW YES
Computer YES
Cassette Locator YES
Robot YES
Auxiliary Panel YES
Key pad & Mouse & Floppy Disk Drive YES
Blower Unit
Blower YES
Note the above information is for guidance only. Changes to configuration might have been made Please note: The OEM of this tool makes a charge of 70,000 JPY to supply the parameter sheet required for exportation
Quantity: Contact for Availability
Serial number: 0597-270
Date of manufacture: 1997
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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