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SAMCO INC RIE-10NR Dry Etcher - SOLD LOT

Private Treaty Sale
Manufacturer and model: SAMCO INC RIE-10NR
Lot Number: 375 | Asset ID: smi82873 | Inventory ID: EU044833
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Description: Tool code PDR02 For configuration sheet Click HEREConfiguration
SAMPLE SPECIFICATION
Sample Size 8”
Sample Shape Wafer
SYSTEM CONFIGURATION
Spec.(based on a catalog) RF : Max = 300W with 13.56MHz
Options Nothing
Pump Turbo Molecular pump,
Number of gas lines 3
Available gases O2、CF4、CHF3
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 28A2241
Date of manufacture: 2007
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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