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Sokudo Co Ltd RF-310A Three Coater / Five Developer (W/Stepper If) - SOLD LOT

Private Treaty Sale
Manufacturer and model: Sokudo Co Ltd RF-310A
Lot Number: 39 | Asset ID: smi83040 | Inventory ID: EU313702
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Description: Tool code CD68 For configuration sheet Click HEREConfiguration :
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block # 2
Coater head # 3
Develop head # 5
Adhesion Chamber # 3
Cooling Plate # 6
Rapid Hot Plate(FRHP) # 16
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver)
Coater
Note the above information is for guidance only. Changes to configuration might have been made
Nozzle # 7
Developer
Nozzle
Slit Scan Nozzle
Quantity: Contact for Availability
Serial number: T00505226A
Date of manufacture: 2007
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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