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Lam Research 2300 Exelan 4 Chamber Dielectric Wafer Etch Tool - SOLD LOT

Private Treaty Sale
Manufacturer and model: Lam Research 2300 Exelan
Lot Number: 4 | Asset ID: smi82827 | Inventory ID: EU313757
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Description: Tool code OXDH1 For configuration sheet Click HEREConfiguration
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
SECS/ GEM yes
Platfrom type Version 2
2300 Exelan Options
Chamber Type 2300 Exelan CFE
Upper Electrode Heated
ESC Cooling Dual Zone
200MM Turbo Pump 1600 L/s Edwards
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Rocker Gate Valve
2300 Gas Box
Gas System Type Enhanced Gas Box II
Std Stacking Kits 4 PM Stacking Kit
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM iPX
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Dry pumps
TM EDWARDS iPX 100A
PM1 EBARA AA100W
PM2 EBARA AA100W
PM3 EBARA AA100W
PM4 EBARA AA100W
Gas scrubber
Model EBARA GTE-3-0WVT
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Weight: 1
Serial number: 1001862-04-07-00014
Date of manufacture: 2004
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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