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TEL Clean Track MARK8Z Coater / Developer - SOLD LOT

Private Treaty Sale
Manufacturer and model: TEL Clean Track MARK8Z
Lot Number: 44 | Asset ID: smi82733 | Inventory ID: EU313607
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Description: Tool code CD27 For configuration sheet Click HEREConfiguration :
WAFER SPECIFICATION : Wafer Size : 200MM, Wafer Shape : SNNF (Semi Notch No Flat), Wafer Cassette : 8” PP Miraial, SMIF Interface : NO
SYSTEM CONFIGURATION : Process Block : 2, Coater head# : 2, Develop head# : 3, Adhesion Chamber# : 2, Hot Plate# : 12, High Cooling Plate# : 5, WEE# : 2, IFB : 1, Chemical Box (HMDS/Solvent/NMDW) : 1, Cup T&H Control : 1
Carrier Station : Stage : 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Coater :
Nozzle# : 3, Resist temperature Control : Multi, Coater Cup : PP+PPS with Mist trap, Spin chuck : PEEK, Resist Pump : F/T200-1 RRC Pump, Back rinse Flow meter : Max range 150ml/min with flow sensor, Solvent Bath Flow meter : Max range 50ml/min with flow sensor, EBR Flow meter : Max range 20ml/min, RRC Nozzle Flow meter : Max range 150ml/min, Drain : Central, Motor Flange temp control : 1, Solvent solution supply : Central supply
Developer :
Nozzle : E Square Nozzle, Develop solution supply : Central supply, Developer Cup : FR-PP + PPS with Mist trap, Spin chuck : PEEK, E Square Nozzle Flow meter : Max range 3.0l/min with flow sensor, Rinse Nozzle Flow meter : Max range 2.0l/min with flow sensor, Back Rinse Flow meter : Max range 150ml/min with flow sensor, Develop temperature control : 15-50deg by 0.1deg pitch, Drain : Central, Motor Flange temp control : 1
Adhesion : Method : Vapor prime by N2 bubbling, Hot plate : 30-179.9deg by 0.1deg pitch, HMDS solution supply : Central supply
Hot Plate : Method : Proximity bake with 0.1mm, Hot plate : 30-179.9deg by 0.1deg pitch
High Cooling Plate : Method : Proximity cooling with 0.1mm, Cooling plate : 15-35deg by 0.1deg pitch, Wait on cooling plate : On
WEE : Lamp : Mercury xenon, Wave length : 300-500nm
IFB : Buffer : 2, Pick up : 1, Cooling plate : 1
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: MD-826777
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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