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TEL Clean Track MARK8Z Coater / Developer - SOLD LOT

Private Treaty Sale
Manufacturer and model: TEL Clean Track MARK8Z
Lot Number: 45 | Asset ID: smi83031 | Inventory ID: EU313837
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Description: Tool code PAT20 For configuration sheet Click HEREConfiguration :
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
SYSTEM CONFIGURATION
Process Block 2, Coater head# 2, Develop head# 2, Adhesion Chamber# 2, Hot Plate# 5, High Temp Plate(DHP)# 3, High Cooling Plate# 7
Chemical Box (HMDS/Solvent/NMDW) 1
Cup T&H Control 1
Carrier Station, Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
3-2. Coater
Nozzle# 3, Resist temperature Control Multi, Coater Cup PP+PPS with Mist trap, Spin chuck PEEK, Resist Pump F/T200-1 RRC Pump, Back rinse Flow meter Max range 150ml/min with flow sensor, Solvent Bath Flow meter Max range 50ml/min with flow sensor, EBR Flow meter Max range 20ml/min, RRC Nozzle Flow meter Max range 150ml/min, Drain Central, Motor Flange temp control 1, Solvent solution supply Central supply
Developer
Nozzle E Square Nozzle, Develop solution supply Central supply, Developer Cup FR-PP + PPS with Mist trap, Spin chuck PEEK, E Square Nozzle Flow meter Max range 3.0l/min with flow sensor, Rinse Nozzle Flow meter Max range 2.0l/min with flow sensor, Back Rinse Flow meter Max range 150ml/min with flow sensor, Develop temperature control 15-50deg by 0.1deg pitch, Drain Central
Adhesion
Method Vapor prime by N2 bubbling, Hot plate 30-179.9deg by 0.1deg pitch, HMDS solution supply Central supply
Dehydration HP
Method Proximity bake with 0.3mm, Hot plate 30-350deg by 1.0deg pitch
Hot Plate
Method Proximity bake with 0.1mm, Hot plate 30-179.9deg by 0.1deg pitch
High Cooling Plate
Method Proximity cooling with 0.1mm, Cooling plate 15-35deg by 0.1deg pitch, Wait on cooling plate On
WEE
Lamp Mercury xenon, Wave length 300-500nm
IFB
Buffer 2, Pick up 1, Cooling plate 1
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 816770
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
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Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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