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TEL Clean Track MARK8Z Coater / Developer - SOLD LOT

Private Treaty Sale
Manufacturer and model: TEL Clean Track MARK8Z
Lot Number: 47 | Asset ID: smi82908 | Inventory ID: EU313834
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Description: Tool code PAT23 For configuration sheet Click HEREConfiguration
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block 2
Coater head# 2
Develop head# 2
Adhesion Chamber# 2
Hot Plate# 7
Cooling Plate# 7
WEE# 1
IFB
Chemical Box (HMDS/Solvent/NMDW) 1
Cup T&H Control 1
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Coater
Nozzle# 2-1:4 2-2:2
Resist temperature Control Multi
Coater Cup PP+PPS with Mist trap
Spin chuck PEEK
Resist Pump F/T200-1 RRC Pump
Back rinse Flow meter Max range 150ml/min with flow sensor
Solvent Bath Flow meter Max range 50ml/min with flow sensor
EBR Flow meter Max range 20ml/min
RRC Nozzle Flow meter Max range 150ml/min
Drain Central
Motor Flange temp control 1
Solvent solution supply Central supply
Developer
Nozzle E Square Nozzle
Develop solution supply Central supply
Developer Cup FR-PP + PPS with Mist trap
Spin chuck PEEK
E Square Nozzle Flow meter Max range 3.0l/min with flow sensor
Rinse Nozzle Flow meter Max range 2.0l/min with flow sensor
Back Rinse Flow meter Max range 150ml/min with flow sensor
Develop temperature control 15-50deg by 0.1deg pitch
Drain Central
Motor Flange temp control 1
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 816773
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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