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TEL Clean Track MARK8Z Coater - SOLD LOT

Private Treaty Sale
Manufacturer and model: TEL Clean Track MARK8Z
Lot Number: 49 | Asset ID: smi83012 | Inventory ID: EU313849
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Description: Tool code COTP3 For configuration sheet Click HEREConfiguration
Process PIX COAT
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block 1
Coater head# 2
DHP (High Temp) 3
Hot Plate# 5
Cooling Plate# 2
Chemical Box (Solvent) 1
SYSTEM CONFIGURATION
Process Block 1
Coater head# 2
DHP (High Temp) 3
Hot Plate# 5
Cooling Plate# 2
Chemical Box (Solvent) 1
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Coater
Nozzle# 2
Resist temperature Control Multi
Coater Cup PP+PPS with Mist trap
1/2
Spin chuck PEEK
Resist Pump ENCOMPASS
Back rinse Flow meter Max range 150cc/min with flow sensor
Solvent Bath Flow meter Max range 50cc/min
EBR Flow meter Max range 20cc/min
Drain Central
Motor Flange temp control 1
Solvent solution supply Central supply
Dehydration HP
Method Proximity bake with 0.2mm
Hot plate 30-350deg by 1.0deg pitch
Hot Plate
Method Proximity bake with 0.1mm
Hot plate 30-179.9deg by 0.1deg pitch
Cooling Plate
Method Proximity cooling with 0.2mm
Cooling plate 15-35deg by 0.1deg pitch
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 816863
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
Related sales
No related event available
Information on This Event
Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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