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TEL Clean Track MARK8Z Coater - SOLD LOT

Private Treaty Sale
Manufacturer and model: TEL Clean Track MARK8Z
Lot Number: 49 | Asset ID: smi83012 | Inventory ID: EU313849
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Description: Tool code COTP3 For configuration sheet Click HEREConfiguration
Process PIX COAT
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
Process Block 1
Coater head# 2
DHP (High Temp) 3
Hot Plate# 5
Cooling Plate# 2
Chemical Box (Solvent) 1
Process Block 1
Coater head# 2
DHP (High Temp) 3
Hot Plate# 5
Cooling Plate# 2
Chemical Box (Solvent) 1
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Nozzle# 2
Resist temperature Control Multi
Coater Cup PP+PPS with Mist trap
Spin chuck PEEK
Back rinse Flow meter Max range 150cc/min with flow sensor
Solvent Bath Flow meter Max range 50cc/min
EBR Flow meter Max range 20cc/min
Drain Central
Motor Flange temp control 1
Solvent solution supply Central supply
Dehydration HP
Method Proximity bake with 0.2mm
Hot plate 30-350deg by 1.0deg pitch
Hot Plate
Method Proximity bake with 0.1mm
Hot plate 30-179.9deg by 0.1deg pitch
Cooling Plate
Method Proximity cooling with 0.2mm
Cooling plate 15-35deg by 0.1deg pitch
Note the above information is for guidance only. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 816863
Date of manufacture: 1996
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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