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Applied Materials Precision 5000 2 Chamber CVD - SOLD LOT

Private Treaty Sale
Manufacturer and model: Applied Materials Precision 5000
Lot Number: 84 | Asset ID: smi82718 | Inventory ID: EU313619
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Description: Tool code CVDS2 For configuration sheet Click HEREConfiguration :
WAFER SPECIFICATION
Wafer Size 200 mm
Wafer Shape Semi Notch/ Orientation Flat
Wafer Cassette 8” PEEK Miraial
SMIF Interface No
SYSTEM CONFIGURATION
Chamber-A,B DLH/SiN Clean Type RF, RGA Port No, DPA No, EPD No
GAS DELIVERY, Single Line Drop (SLD) No, System Cabinet Exhaust Upper 5.REMOTE FRAME
HF RF Generator, CH-A:AX-1000Ⅱ(ADTEC), CH-B:AX-1000Ⅱ(ADTEC)
LF RF Generator
CH-A:TL-10RU(ASTECH),LPG-3AM(ENI) CH-B:TL-10RU(ASTECH),LPG-3AM(ENI)
LOAD LOCK EBARA:A30W Missing
CHAMBER EBARA: 80x25UERR6M (QTY:2) Missing
DPA GENERATOR ENI:DPG-10
MINI-CONTROLLER
HEAT EXCHANGER AMAT-0
GAS CABINET TEOS AUTO FILL SYSTEM(MODEL H)
OZONE MONITOR EG-2001
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantity: Contact for Availability
Serial number: 5870
Date of manufacture: 1993
Location: Nishiwaki, Japan
Preview inspection: By prior appointment
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Contact Details
Contact: Andy Hackett
Telephone: +44 (0)7764 308 689
Contact: Eric Zhang
Telephone: +86 21 62726246 801
Telephone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Telephone: +81 (0)904 422 9392
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