Sokudo Co Ltd RF-310A Three Coater / Five Developer (W/Stepper If) - LOTE VENDIDO
Ventas por Trato Privado
Fabricante y modelo: Sokudo Co Ltd RF-310A
Título de la venta: 200mm Wafer Fabrication Tools
Número de lote: 39 | ID. del bien: smi83040 | ID de inventario: EU313702
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Descripción: Tool code CD68 For configuration sheet Click HEREConfiguration :
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block # 2
Coater head # 3
Develop head # 5
Adhesion Chamber # 3
Cooling Plate # 6
Rapid Hot Plate(FRHP) # 16
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver)
Coater
Note the above information is for guidance only. Changes to configuration might have been made
Nozzle # 7
Developer
Nozzle
Slit Scan Nozzle
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block # 2
Coater head # 3
Develop head # 5
Adhesion Chamber # 3
Cooling Plate # 6
Rapid Hot Plate(FRHP) # 16
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver)
Coater
Note the above information is for guidance only. Changes to configuration might have been made
Nozzle # 7
Developer
Nozzle
Slit Scan Nozzle
Cantidad: Contactese para averiguar acerca de disponibilidad
Número de serie: T00505226A
Año de fabricación: 2007
Ubicación: Nishiwaki, Japan
Vista previa de inspección: Con cita previa
Ventas relacionadas
No related event available
Información de este evento
Datos de contacto
Contacto: Andy Hackett
País: Reino Unido
Teléfono: +44 (0)7764 308 689
Contacto: Eric Zhang
Teléfono: +86 21 62726246 801
Teléfono 2: +86 139 1795 6751
E-mail: eric.zhang@liquidityservices.com
Contacto: Yusuke Uchiyama
Teléfono: +81 (0)904 422 9392
