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TEL Clean Track MARK8 Developer - LOT VENDU

Vente de gré à gré
Fabricant et modèle: TEL Clean Track MARK8
N° de lot: 48 | N° d'article: smi82732 | N° d'inventaire: EU313828
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Description: Tool code PAT22 For configuration sheet Click HEREConfiguration
Process Developer
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block 2
Coater head# 2
Develop head# 2
Adhesion Chamber# 1
Hot Plate# 7
DHP (High Temp) 2
Cooling Plate# 7
WDS(Cup wash disc) 1
WEE# 1
IFB 1
Chemical Box (HMDS/Solvent) 1
Cup T&H Control No
Carrier Station Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Coater
Nozzle# 4
Resist temperature Control Single
Coater Cup PP with Mist trap
Spin chuck PEEK
Resist Pump RRC Pump
Back rinse Flow meter Max range 150cc/min with flow sensor
Solvent Bath Flow meter Max range 50cc/min
EBR Flow meter Max range 20cc/min
Drain Central
Motor Flange temp control 1
Solvent Supply Central supply
Developer
Nozzle E Square Nozzle
Nozzle# 2
Develop solution supply Central supply
Developer Cup PRP-P + PPS with Mist trap
Spin chuck PEEK
E Square Nozzle Flow meter Max range 1.2l/min with flow sensor
Rinse Nozzle Flow meter Max range 1.2l/min with flow sensor
Back Rinse Flow meter Max range 150cc/min
Develop temperature control 15-50deg by 0.1deg pitch
Drain Central
Motor Flange temp control 1
Note the above information is for guidance only. Changes to configuration might have been made
Quantité: Contact pour disponibilité
Numéro de série: MD-826670
Date de fabrication: 1996
Lieu: Nishiwaki, Japan
Visites: Par rendez-vous au préalable
Ventes liées
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Information sur la vente
Coordonnées
Contact: Andy Hackett
Pays: Royaume-Uni
Téléphone: +44 (0)7764 308 689
Contact: Eric Zhang
Pays: Chine
Téléphone: +86 21 62726246 801
Téléphone 2: +86 139 1795 6751
Contact: Yusuke Uchiyama
Pays: Japon
Téléphone: +81 (0)904 422 9392
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