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TEL Clean Track MARK8 Coater - SOLD LOT

Vendita con accordo privato
Marche e modelli: TEL Clean Track MARK8
Incluso nella seguente vendita: 200mm Wafer Fabrication Tools
Numero lotto: 41 | ID articolo: smi82806 | ID inventario: EU313841
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Descrizione: Tool code COTP1 For configuration sheet Click HEREConfiguration
Process PIX COAT
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block 1
Coater head# 2
DHP (High Temp) 3
Hot Plate# 5
Cooling Plate# 2
Chemical Box (Solvent) 1
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver or Uni - cassette)
Coater
Nozzle# 2
Resist temperature Control Multi
Coater Cup PP+PPS with Mist trap
1/4
Spin chuck PEEK
Resist Pump ENCOMPASS
Back rinse Flow meter Max range 150cc/min with flow sensor
Solvent Bath Flow meter Max range 50cc/min
EBR Flow meter Max range 20cc/min
Drain Central
Motor Flange temp control 1
Solvent solution supply Central supply
Dehydration HP
Method Proximity bake with 0.2mm
Hot plate 30-350deg by 1.0deg pitch
Hot Plate
Method Proximity bake with 0.1mm
Hot plate 30-179.9deg by 0.1deg pitch
Cooling Plate
Method Proximity cooling with 0.2mm
Cooling plate 15-35deg by 0.1deg pitch
Note the above information is for guidance only. Changes to configuration might have been made
Quantità: Contatta per disponibilità
Numero di serie: 812114
Data di produzione: 1992
Località: Nishiwaki, Japan
Ispezione: su appuntamento
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Information on This Event
Contact Details
Contatto: Andy Hackett
Telefono: +44 (0)7764 308 689
Contatto: Eric Zhang
Telefono: +86 21 62726246 801
Telefono 2: +86 139 1795 6751
Contatto: Yusuke Uchiyama
Telefono: +81 (0)904 422 9392
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