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Canon FPA-5500iZ I-Line Stepper 365Nm - SOLD LOT

Vendita con accordo privato
Marche e modelli: Canon FPA-5500iZ
Incluso nella seguente vendita: 200mm Wafer Fabrication Tools
Numero lotto: 7 | ID articolo: smi82744 | ID inventario: EU313608
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Descrizione: Tool code PAT51 For configuration sheet Click HEREi-line Stepper, Lens NA 0.57 MAX, Left inline
Configuration :
WAFER SPECIFICATION : Wafer Size : 200MM, Wafer Shape : SNNF (Semi Notch No Flat), Wafer Cassette : 8” PP Miraial, SMIF Interface : No
SYSTEM CONFIGURATION :
Projection Lens / Illumination System :
Magnification : 1/4
NA : 0.45 ~ 0.57
Field Size : 26 x 33mm
Illumination σ(Conventional) : 0.75~0.40 (at NA=0.57)
Illumination σ(Annular) : NA0.57 Outerσ0.75 Inner σ 0.50
Light Source : i-line(365nm)
Reticle Blind Setting Area : Max : Field size, Min : 0.4 x 0.4mm
Reticle Alignment : Alignment sensor : Image processing method
Reticle Stage : Reticle Holder size : 6inch, Interferrometer : 3 axis
Wafer Alignment : Alignment sensor : Image processing method, Alignment Light Source : 590±60nm (wavelength selectable)
Wafer Stage : Wafer Holder size : 200mm, Interferrometer : 6 axis
Wafer Feeder : Pre-alignment : Edge detection system (non-contact), Chuck maintenance : Auto Chuck Clean & Load/Unload System, Inline Type : Left Inline
Reticle Changer : Library# : 29, Reticle Case Type : Canon Type, Particle checker : Pellicle Particle Checker(PPC)
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
Quantità: Contatta per disponibilità
Numero di serie: 3067759
Data di produzione: 2003
Località: Nishiwaki, Japan
Ispezione: su appuntamento
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Contact Details
Contatto: Andy Hackett
Telefono: +44 (0)7764 308 689
Contatto: Eric Zhang
Telefono: +86 21 62726246 801
Telefono 2: +86 139 1795 6751
Contatto: Yusuke Uchiyama
Telefono: +81 (0)904 422 9392
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