Lam Research 2300 Versys Silicon Wafer Etch System - 売却ロット
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製造メーカーとモデル: Lam Research 2300 Versys Silicon
ロットナンバー: 3 | 商品ID: smi82658 | 資産ID: EU313686
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説明: Tool code PLYE4 For configuration sheet Click HEREConfiguration
CASS NEST PLASTIC 8"
serial numbers: 72230 (PM1: 23PL0349, PM2: 23PL0350, PM3: 23PL0351, PM4: 23PL352 )
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
software version Version 1.7.1-SP4-HF2-Releace
SECS/ GEM yes
2300 Versys Silicon Options
Chamber Type 2300 Versys Silicon
Wafer Clamping Mechanism Monopolar ESC, Ceramic
O-rings Chemraz
TCP Source 3155059-026
200MM Turbo Pump EDWARDS STP-A2203LVS
Heated Foreline Heated
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Barrier Seal Door
2300 Gas Box
Std Stacking Kits 4 PM Stacking Kit
2300 Versys Silicon Gas Box
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM EDWARDS IPX 100A
VTM Robot BROOKS Magna Tran_7.1 / 108000-07
ATM Robot BROOKS Actran_7 / 151864
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Note the above information is for guidance only. Changes to configuration might have been made
CASS NEST PLASTIC 8"
serial numbers: 72230 (PM1: 23PL0349, PM2: 23PL0350, PM3: 23PL0351, PM4: 23PL352 )
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
software version Version 1.7.1-SP4-HF2-Releace
SECS/ GEM yes
2300 Versys Silicon Options
Chamber Type 2300 Versys Silicon
Wafer Clamping Mechanism Monopolar ESC, Ceramic
O-rings Chemraz
TCP Source 3155059-026
200MM Turbo Pump EDWARDS STP-A2203LVS
Heated Foreline Heated
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Barrier Seal Door
2300 Gas Box
Std Stacking Kits 4 PM Stacking Kit
2300 Versys Silicon Gas Box
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM EDWARDS IPX 100A
VTM Robot BROOKS Magna Tran_7.1 / 108000-07
ATM Robot BROOKS Actran_7 / 151864
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Note the above information is for guidance only. Changes to configuration might have been made
数量: 購入に関するお問い合わせ
シリアルナンバー: 72230
製造年月日: 2003
商品所在地: Nishiwaki, Japan
商品の下見: 事前予約制
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連絡先情報
お問い合わせ先: Andy Hackett
国名: 英国
電話番号: +44 (0)7764 308 689
お問い合わせ先: Eric Zhang
国名: 中国
電話番号: +86 21 62726246 801
電話番号 2: +86 139 1795 6751
お問い合わせ先: Yusuke Uchiyama
国名: 日本
電話番号: +81 (0)904 422 9392
