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Lam Research 2300 Exelan 4 Chamber Dielectric Wafer Etch Tool - 세부품목 판매

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제조사 및 모델: Lam Research 2300 Exelan
로트 번호: 4 | 자산 ID : smi82827 | 재고 ID:: EU313757
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설명: Tool code OXDH1 For configuration sheet Click HEREConfiguration
CASS NEST PLASTIC 8"
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
SECS/ GEM yes
Platfrom type Version 2
2300 Exelan Options
Chamber Type 2300 Exelan CFE
Upper Electrode Heated
ESC Cooling Dual Zone
200MM Turbo Pump 1600 L/s Edwards
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Rocker Gate Valve
2300 Gas Box
Gas System Type Enhanced Gas Box II
Std Stacking Kits 4 PM Stacking Kit
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM iPX
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Dry pumps
TM EDWARDS iPX 100A
PM1 EBARA AA100W
PM2 EBARA AA100W
PM3 EBARA AA100W
PM4 EBARA AA100W
Gas scrubber
Model EBARA GTE-3-0WVT
Note the above information is for guidance only. Changes to configuration might have been made
수량: 잔여물량 문의
무게: 1
일련 번호: 1001862-04-07-00014
제조일자: 2004
위치: Nishiwaki, Japan
미리 보기 점검 : 이전 예약 기준
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세부 정보
연락처: Andy Hackett
국가: 영국
전화: +44 (0)7764 308 689
연락처: Eric Zhang
국가: 중국
전화: +86 21 62726246 801
전화 2: +86 139 1795 6751
연락처: Yusuke Uchiyama
국가: 일본
전화: +81 (0)904 422 9392
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