Lam Research 2300 Versys Silicon Wafer Etch System - 已售拍品

描述: Tool code PLYE2 For configuration sheet Click HEREConfiguration
CASS NEST PLASTIC 8"
serial numbers: 64617 (PM1: 23PL0206, PM2: 23PL0207, PM3: 23PL0208, PM4: 23PL0209 )
Wafer Shape SNNF (Semi Notch No Flat)
SMIF Interface NO
Wafer size 200mm
System Information
process chamber qty 4
software version Version 1.7.1-SP4-HF2-Releace
SECS/ GEM yes
2300 Versys Silicon Options
Chamber Type 2300 Versys Silicon
Wafer Clamping Mechanism Monopolar ESC, Ceramic
O-rings Chemraz
TCP Source 3155059-026
200MM Turbo Pump EDWARDS STP-A2203LVS （PM1 Cont. missing）
Heated Foreline Heated
Endpoint Detection Optical Emission Spectroscopy
Chamber Isolation Valve Barrier Seal Door
2300 Gas Box
Std Stacking Kits 4 ( 2 gas boxes stacked x2 )
2300 Versys Silicon Gas Box
Gas Line 12 Gas Configuration
Gas Box Inlet Option Regulated Inlet Gas Panel
Gas Filters Standard Filter
2300 Platform
Front End Load Port Cassette 3 Open Cassette
Backing Pumps for TM EDWARDS IPX 100A
VTM Robot BROOKS Magna Tran_7.1 / 201600-201-001
ATM Robot BROOKS Actran_7 / 151864
User Interface Options Side and Front Monitor UI
System UPS Circuitry System UPS Circuitry required
Earth Leakage Breaker ELB
Signal Tower R-O-G-B Signal Tower
Note the above information is for guidance only. Changes to configuration might have been made

数量: 联系查询有效性

序列号: 64617

制造年份: 2002

地点: Nishiwaki, Japan

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