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SEN LEX Low Enery Implanter

私人协议销售
生产厂商和型号: SEN LEX
批次编号: 15 | 资产 ID: smi82990 | 库存 ID: EU313579
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描述: Tool code HIC10 For configuration sheet Click HEREBatch Type High current , Low Energy, 13wfs/batch
Configuration :
Description : High current implanter
Tool ID : HIC10
Tool Serial Number : #390
OEM : SEN
Model : LEX
Vintage : 2003
Process : High current ion implanter
Wafer Size : 200MM
Wafer Shape : SNNF (Semi Notch No Flat)
Wafer Cassette : 8" Plastic Miraial
SMIF Interface : NO
Power Distribution : 200V 60Hz 70KVA 3phase
Beam Energy : 0.2-70keV
Gasses : BF3 HP, PH3 SDS, AsH3 SDS
Cryo pump : Daikin V208SC612FH
Cryo pump : Daikin V24MC608GSR
Cryo Compressor : Daikin U110DWCH
Roughing Pump : Ebara A07V
Roughing Pump : Ebara A30W
TMP : MITSUBISHI PT-1500
TMP : SEIKO SEIKI STP-H2002C
Seal pump : ALCATEL MDP5011
Seal pump : ULVAC DA-20D
Ion Source : ELS type
Mo-ARC CHAMBER
Vaporizer : Nothing
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
数量: 联系查询有效性
序列号: 390
地点: Nishiwaki, Japan
看货安排: 须提前预约
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联系方式
联系人: Andy Hackett
电话: +44 (0)7764 308 689
联系人: Eric Zhang
电话: +86 21 62726246 801
电话 2: +86 139 1795 6751
联系人: Yusuke Uchiyama
电话: +81 (0)904 422 9392
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