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Applied Materials Centura C5200W 4 Chamber CVD - 已售拍品

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生产厂商和型号: Applied Materials Centura C5200W
批次编号: 22 | 资产 ID: smi82901 | 库存 ID: EU313811
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描述: Tool code CVDB4 For configuration sheet Click HEREConfiguration
Process TixZ/CVD Ti
Software Version B4223
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PEEK Miraial
SYSTEM CONFIGURATION
Wafer Transfer HP+ (Wafer Centering:ON THE FRY)
Chamber-A,B,C,D TixZ/CVD Ti
Manometer MKS 10 / 100Torr
Clean Type Cl2 Clean
RGA Port Yes(NW25 END CAP)
Chamber-E MS-Cool
Chamber-F NA
GAS DELIVERY
Single Line Drop (SLD) No
System Cabinet Exhaust Side with Top/Bottom Connection Duct
SYSTEM CONTROLLER Yes
GENERATOR RACK ADVANCED ENERGY:PDX-900-2V(QTY:4)
HEAT EXCHANGER STEELHEAD-0 (QTY:2)
LIQUID CABINET JAPAN AIR GASES:AFC-TiCl4-CAD-3-M
GAS ABATEMENT EDWARDS TPU
DRY PUMP
LOAD LOCK EBARA:A30W
BUFFER EBARA:A70W
CHAMBER EBARA:AAS100W(QTY:4)
Note the above information is for guidance only. Changes to configuration might have been made
数量: 联系查询有效性
序列号: X046
制造年份: 1998
地点: Nishiwaki, Japan
看货安排: 须提前预约
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联系方式
联系人: Andy Hackett
电话: +44 (0)7764 308 689
联系人: Eric Zhang
电话: +86 21 62726246 801
电话 2: +86 139 1795 6751
联系人: Yusuke Uchiyama
电话: +81 (0)904 422 9392
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