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DNS WS820C Wet Bench / Vapour Dryer - 已售拍品

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生产厂商和型号: DNS WS820C
批次编号: 241 | 资产 ID: smi82957 | 库存 ID: EU313590
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描述: Tool code HODF4 For configuration sheet Click HEREHF/DIW/SC1/DIW/DIW/Vaper Dryer
Configuration :
CASSETTE : PFA 8" 50wf (KM-820)
Wafer Shape : SNNF (Semi Notch No Flat)
SMIF Interface : NO
Wafer size : 200mm
CLEAN UNIT : ULPA
robot : 5
Process bath : Loader : Wafer transfer, 4stock PFA cassette, Chuck clean : DIW spray and N2 Dry, HF : PTFE / 25C, EDR : Quartz / Cold DIW with shower, SC1 : Quartz / Megasonic / 25C, QDR : Quartz / Cold DIW with shower, Final rinse : Quartz / Cold DIW with resistivity, Dryer : Quartz / Vapor Dryer, Un-loader : Wafer transfer, 4stock PFA cassette
Megasonic : Manufacturer : Kaijo co., Type : 6848 (SC1), Power : 950kHz 400w x4 (SC1)
Chemical : Chemical1 : NH4OH, Chemical2 : H2O2, Chemical3 : HF, Chemical4 : IPA, DIW : Hot and Cold
Electrical : Power : 100v 150A / 200v 115A, SECS : SECS II, UPS : 100v 6kVA
Exhaust : ACID : 1, ALKALI : 1, SOLVENT : 1
Option : Sensor : Horiba HF sensor CM-201, Sensor : Kurabo sensor KCM-21-UV, Notch aligner : Loader, Ionizer : Loader, WF rotation : Back to Back wafer transfer (even slot rotation) load/unload
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
数量: 联系查询有效性
Dimensions: 7670mm(W) x 2380mm(D) x 2800mm(H)
序列号: 55520-2108
制造年份: 1996
地点: Nishiwaki, Japan
看货安排: 须提前预约
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联系方式
联系人: Andy Hackett
电话: +44 (0)7764 308 689
联系人: Eric Zhang
电话: +86 21 62726246 801
电话 2: +86 139 1795 6751
联系人: Yusuke Uchiyama
电话: +81 (0)904 422 9392
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