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Sokudo Co Ltd RF-310A Three Coater / Five Developer (W/Stepper If) - 已售拍品

私人协议销售
生产厂商和型号: Sokudo Co Ltd RF-310A
批次编号: 39 | 资产 ID: smi83040 | 库存 ID: EU313702
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描述: Tool code CD68 For configuration sheet Click HEREConfiguration :
Process COAT/DEVE
WAFER SPECIFICATION
Wafer Size 200MM
Wafer Shape SNNF (Semi Notch No Flat)
Wafer Cassette 8” PP Miraial
SYSTEM CONFIGURATION
Process Block # 2
Coater head # 3
Develop head # 5
Adhesion Chamber # 3
Cooling Plate # 6
Rapid Hot Plate(FRHP) # 16
Carrier Station
Stage 1×4 Side Loading (Sender /Receiver)
Coater
Note the above information is for guidance only. Changes to configuration might have been made
Nozzle # 7
Developer
Nozzle
Slit Scan Nozzle
数量: 联系查询有效性
序列号: T00505226A
制造年份: 2007
地点: Nishiwaki, Japan
看货安排: 须提前预约
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联系方式
联系人: Andy Hackett
电话: +44 (0)7764 308 689
联系人: Eric Zhang
电话: +86 21 62726246 801
电话 2: +86 139 1795 6751
联系人: Yusuke Uchiyama
电话: +81 (0)904 422 9392
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