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Canon FPA-5500iZ+ I-Line Stepper 365Nm - 已售拍品

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生产厂商和型号: Canon FPA-5500iZ+
批次编号: 6 | 资产 ID: smi82977 | 库存 ID: EU313610
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描述: Tool code PAT53 For configuration sheet Click HEREi-line Stepper, Lens NA 0.57 MAX, Local
Configuration :
WAFER SPECIFICATION : Wafer Size : , Wafer Shape : , Wafer Cassette :
SMIF Interface : No
SYSTEM CONFIGURATION :
Projection Lens / Illumination System :
Magnification : 1/4
NA : 0.45 ~ 0.57
Field Size : 26 x 33mm
Illumination σ(Conventional) : 0.75~0.40 (at NA=0.57)
Illumination σ(Annular) : NA0.57 Outerσ0.75 Inner σ 0.50
Light Source : i-line(365nm)
Reticle Blind Setting Area : Max : Field size, Min : 0.4 x 0.4mm
Reticle Alignment : Alignment sensor : Image processing method
Reticle Stage : Reticle Holder size : 6inch, Interferrometer : 3 axis
Wafer Alignment : Alignment sensor : Image processing method, Alignment Light Source : 590±60nm (wavelength selectable)
Wafer Stage : Wafer Holder size : 200mm, Interferrometer : 6 axis
Wafer Feeder : Pre-alignment : Edge detection system (non-contact), Chuck maintenance : Auto Chuck Clean & Load/Unload System, Inline Type : Local
Reticle Changer : Library# : 29, Reticle Case Type : Canon Type, Particle checker : Pellicle Particle Checker(PPC)
Note the above information is for guidance only and was the tools original configuration. Changes to configuration might have been made
数量: 联系查询有效性
序列号: 3127779
制造年份: 2003
地点: Nishiwaki, Japan
看货安排: 须提前预约
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联系人: Andy Hackett
电话: +44 (0)7764 308 689
联系人: Eric Zhang
电话: +86 21 62726246 801
电话 2: +86 139 1795 6751
联系人: Yusuke Uchiyama
电话: +81 (0)904 422 9392
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